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Open Engineering

Figure 1. Geometry of the micro-actuator (length=300$\mu m$, width=100$\mu m$, thickness=2$\mu m$). The aluminium plate is 2$\mu m$ above the electrode.

Figure 2. Electric scalar potential and electric force acting on the plate, calculated with my own code and visualized with Gmsh.

Figure 3. Vertical displacement of the plate : (left), electromechanical simulation (OOfelie+my code) for an excitation frequency equal to $0.5\,\nu_r$, $\nu_r$ and $2\,\nu_r$, where $\nu_r$ is the resonance frequency; (right), electromechanical simulation with/without fluid coupling (OOfelie+my code+Didier Vigneron's code) at the resonance frequency.