team:gdeliege:mems
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| team:gdeliege:mems [2015/08/12 17:39] – geoffrey | team:gdeliege:mems [2016/03/30 15:23] (current) – external edit 127.0.0.1 | ||
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| - | ===== Micro Electro-Mechanical Systems | + | ===== Microelectromechanical systems |
| === Background === | === Background === | ||
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| //Figure 1. Geometry of the micro-actuator (length=300$\mu m$, width=100$\mu m$, thickness=2$\mu m$). The aluminium plate is 2$\mu m$ above the electrode.// | //Figure 1. Geometry of the micro-actuator (length=300$\mu m$, width=100$\mu m$, thickness=2$\mu m$). The aluminium plate is 2$\mu m$ above the electrode.// | ||
| - | === Nummerical | + | === Numerical |
| My first task was to design an automated way to calculate the mesh deformation of the air domain | My first task was to design an automated way to calculate the mesh deformation of the air domain | ||
| when the actuator moves. | when the actuator moves. | ||
| The difficulty was to keep an acceptable aspect ratio of the deformed mesh elements, which was of course critical between the plate and electrode. | The difficulty was to keep an acceptable aspect ratio of the deformed mesh elements, which was of course critical between the plate and electrode. | ||
| - | It was therefore necessary | + | I also had to couple |
| - | by Didier Vigneron with a mechanical software, OOfelie, | + | * a fluid dynamic |
| + | * a mechanical | ||
| + | * a C++ code of my own, which calculated the electrostatic force and the mesh deformation. | ||
| + | An external script called the different codes in turn and converted the input/ | ||
| + | Fig. 2 shows results of the electric simulation on a quarter of the plate. | ||
| + | Electromechanical simulations were performed at different excitation frequencies (Fig. 3, left) and a full electromechanical-fluid simulation was made at the resonance frequency (Fig. 3, right). | ||
| {{ : | {{ : | ||
| - | //Figure 2. Electric scalar potential and electric force acting on the plate, calculated with my own code and visualized | + | //Figure 2. Electric scalar potential and electric force acting on the plate, calculated with my own code (mesh and visualization |
| {{ : | {{ : | ||
| //Figure 3. Vertical displacement of the plate : (left), electromechanical simulation (OOfelie+my code) for an excitation frequency equal to $0.5\, | //Figure 3. Vertical displacement of the plate : (left), electromechanical simulation (OOfelie+my code) for an excitation frequency equal to $0.5\, | ||
| + | \\ | ||
| + | \\ | ||
| + | [[team: | ||
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