team:gdeliege:mems
Differences
This shows you the differences between two versions of the page.
Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
team:gdeliege:mems [2015/08/12 17:39] – geoffrey | team:gdeliege:mems [2016/03/30 15:23] (current) – external edit 127.0.0.1 | ||
---|---|---|---|
Line 1: | Line 1: | ||
- | ===== Micro Electro-Mechanical Systems | + | ===== Microelectromechanical systems |
=== Background === | === Background === | ||
Line 28: | Line 28: | ||
//Figure 1. Geometry of the micro-actuator (length=300μm, width=100μm, thickness=2μm). The aluminium plate is 2μm above the electrode.// | //Figure 1. Geometry of the micro-actuator (length=300μm, width=100μm, thickness=2μm). The aluminium plate is 2μm above the electrode.// | ||
- | === Nummerical | + | === Numerical |
My first task was to design an automated way to calculate the mesh deformation of the air domain | My first task was to design an automated way to calculate the mesh deformation of the air domain | ||
when the actuator moves. | when the actuator moves. | ||
The difficulty was to keep an acceptable aspect ratio of the deformed mesh elements, which was of course critical between the plate and electrode. | The difficulty was to keep an acceptable aspect ratio of the deformed mesh elements, which was of course critical between the plate and electrode. | ||
- | It was therefore necessary | + | I also had to couple |
- | by Didier Vigneron with a mechanical software, OOfelie, | + | * a fluid dynamic |
+ | * a mechanical | ||
+ | * a C++ code of my own, which calculated the electrostatic force and the mesh deformation. | ||
+ | An external script called the different codes in turn and converted the input/ | ||
+ | Fig. 2 shows results of the electric simulation on a quarter of the plate. | ||
+ | Electromechanical simulations were performed at different excitation frequencies (Fig. 3, left) and a full electromechanical-fluid simulation was made at the resonance frequency (Fig. 3, right). | ||
{{ : | {{ : | ||
- | //Figure 2. Electric scalar potential and electric force acting on the plate, calculated with my own code and visualized | + | //Figure 2. Electric scalar potential and electric force acting on the plate, calculated with my own code (mesh and visualization |
{{ : | {{ : | ||
//Figure 3. Vertical displacement of the plate : (left), electromechanical simulation (OOfelie+my code) for an excitation frequency equal to 0.5νr, | //Figure 3. Vertical displacement of the plate : (left), electromechanical simulation (OOfelie+my code) for an excitation frequency equal to 0.5νr, | ||
+ | \\ | ||
+ | \\ | ||
+ | [[team: |
team/gdeliege/mems.1439393943.txt.gz · Last modified: 2016/03/30 15:22 (external edit)