Metafor

ULiege - Aerospace & Mechanical Engineering

User Tools

Site Tools


team:gdeliege:mems

Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revisionPrevious revision
Next revision
Previous revision
team:gdeliege:mems [2015/08/12 17:39] geoffreyteam:gdeliege:mems [2016/03/30 15:23] (current) – external edit 127.0.0.1
Line 1: Line 1:
-===== Micro Electro-Mechanical Systems =====+===== Microelectromechanical systems =====
  
 === Background === === Background ===
Line 28: Line 28:
 //Figure 1. Geometry of the micro-actuator (length=300$\mu m$, width=100$\mu m$, thickness=2$\mu m$). The aluminium plate is 2$\mu m$ above the electrode.// //Figure 1. Geometry of the micro-actuator (length=300$\mu m$, width=100$\mu m$, thickness=2$\mu m$). The aluminium plate is 2$\mu m$ above the electrode.//
  
-=== Nummerical simulations ===+=== Numerical simulations ===
  
 My first task was to design an automated way to calculate the mesh deformation of the air domain My first task was to design an automated way to calculate the mesh deformation of the air domain
 when the actuator moves. when the actuator moves.
 The difficulty was to keep an acceptable aspect ratio of the deformed mesh elements, which was of course critical between the plate and electrode. The difficulty was to keep an acceptable aspect ratio of the deformed mesh elements, which was of course critical between the plate and electrode.
-It was therefore necessary to couple a finite volume software developed +I also had to couple the different programs needed to make the coupled simulations: 
-by Didier Vigneron with a mechanical software, OOfelie, developed by [[http://www.open-engineering.com/|Open Engineering]].+  * fluid dynamic finite volume software written in C by Didier Vigneron, parallelized with MPI (distributed memory); 
 +  * a mechanical finite element software, OOfelie, written in C++ by [[http://www.open-engineering.com/|Open Engineering]]
 +  * a C++ code of my own, which calculated the electrostatic force and the mesh deformation. 
 +An external script called the different codes in turn and converted the input/output files to ensure data compatibility. 
 +Fig. 2 shows results of the electric simulation on a quarter of the plate. 
 +Electromechanical simulations were performed at different excitation frequencies (Fig. 3, left) and a full electromechanical-fluid simulation was made at the resonance frequency (Fig. 3, right).
  
 {{ :team:gdeliege:arc01.png |}} {{ :team:gdeliege:arc01.png |}}
-//Figure 2. Electric scalar potential and electric force acting on the plate, calculated with my own code and visualized with [[http://www.geuz.org/gmsh|Gmsh]].//+//Figure 2. Electric scalar potential and electric force acting on the plate, calculated with my own code (mesh and visualization with [[http://www.geuz.org/gmsh|Gmsh]]).//
  
 {{ :team:gdeliege:arc02.png |}} {{ :team:gdeliege:arc02.png |}}
 //Figure 3. Vertical displacement of the plate : (left), electromechanical simulation (OOfelie+my code) for an excitation frequency equal to $0.5\,\nu_r$, $\nu_r$ and $2\,\nu_r$, where $\nu_r$ is the resonance frequency; (right), electromechanical simulation with/without fluid coupling (OOfelie+my code+Didier Vigneron's code) at the resonance frequency.// //Figure 3. Vertical displacement of the plate : (left), electromechanical simulation (OOfelie+my code) for an excitation frequency equal to $0.5\,\nu_r$, $\nu_r$ and $2\,\nu_r$, where $\nu_r$ is the resonance frequency; (right), electromechanical simulation with/without fluid coupling (OOfelie+my code+Didier Vigneron's code) at the resonance frequency.//
 +\\
 +\\
 +[[team:gdeliege|Back to main page]]
team/gdeliege/mems.1439393943.txt.gz · Last modified: 2016/03/30 15:22 (external edit)

Donate Powered by PHP Valid HTML5 Valid CSS Driven by DokuWiki